Investigations on TaHf alloys for thin film resistor applications
| Autor: | Wang, Kao-Yuan, Chang, Ting-Chang, Chen, Wen-Chung, Zhang, Yong-Ci, Tseng, Yi-Ting, Yang, Chih-Cheng, Lin, Chun-Chu, Wu, Pei-Yu, Tan, Yung-Fang, Tsai, Tsung-Ming |
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| Zdroj: | In Materials Chemistry and Physics 1 June 2022 285 |
| Databáze: | ScienceDirect |
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