Vapor phase deposition of fluoroalkyl trichlorosilanes on silicon and glass: Influence of deposition conditions and chain length on wettability and adhesion forces

Autor: Psarski, Maciej, Celichowski, Grzegorz, Bystrzycka, Ewelina, Pawlak, Daniel, Grobelny, Jarosław, Cichomski, Michał
Zdroj: In Materials Chemistry and Physics 15 January 2018 204:305-314
Databáze: ScienceDirect