Effect of self-bias on the elemental composition and neutron absorption of boron carbide films deposited by RF plasma enhanced CVD

Autor: Bute, A., Jagannath, Kar, R., Chopade, S.S., Desai, S.S., Deo, M.N., Rao, Pritty, Chand, N., Kumar, S., Singh, K., Patil, D.S., Sinha, S.
Zdroj: In Materials Chemistry and Physics 1 October 2016 182:62-71
Databáze: ScienceDirect
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