Structural and dielectric properties of parylene-VT4 thin films

Autor: Kahouli, A., Sylvestre, A., Laithier, J.-F., Lutsen, L., Pairis, S., André, E., Garden, J.-L.
Zdroj: In Materials Chemistry and Physics 14 February 2014 143(3):908-914
Databáze: ScienceDirect