Effect of deposition temperature on microstructure and corrosion resistance of ZrN thin films deposited by DC reactive magnetron sputtering
| Autor: | Roman, Daiane, Bernardi, Juliane, Amorim, Cintia L.G. de, de Souza, Fernando S., Spinelli, Almir, Giacomelli, Cristiano, Figueroa, Carlos A., Baumvol, Israel J.R., Basso, Rodrigo L.O. |
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| Zdroj: | In Materials Chemistry and Physics 2011 130(1):147-153 |
| Databáze: | ScienceDirect |
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