Effect of rapid thermal annealing on the properties of PECVD SiN x thin films
| Autor: | Karunagaran, B., Chung, S.J., Velumani, S., Suh, E.-K. |
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| Zdroj: | In Materials Chemistry and Physics 2007 106(1):130-133 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Karunagaran, B., Chung, S.J., Velumani, S., Suh, E.-K. |
|---|---|
| Zdroj: | In Materials Chemistry and Physics 2007 106(1):130-133 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect