Hardness of C, CN x and AlN thin films after rapid thermal annealing
| Autor: | Beshkov, G., Vassilev, G.P., Elizalde, M.R., Gomez-Acebo, T. |
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| Zdroj: | In Materials Chemistry and Physics 2003 82(2):452-457 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Beshkov, G., Vassilev, G.P., Elizalde, M.R., Gomez-Acebo, T. |
|---|---|
| Zdroj: | In Materials Chemistry and Physics 2003 82(2):452-457 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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