Carbon nitride thin films deposited by nitrogen-ion-assisted KRF excimer ablation of graphite

Autor: Feng, Lu Yong a, *, Min, Ren Zhong a, Qiao, Ni Hai a, Feng, He Zi a, Chan, D.S.H. a, Seng, Low Teck a, Yin, Chen Shao b, Gamani, Karunasiri c, Geng, Chen c, Kun, Li d
Zdroj: In Applied Surface Science 1999 138:494-498
Databáze: ScienceDirect