XPS study of the nitridation of hafnia on silicon
| Autor: | Mayorga-Garay, Marisol, Cortazar-Martinez, Orlando, Torres-Ochoa, Jorge Alejandro, Silvas-Cabrales, Diamanta Perle, Corona-Davila, Felipe, Guzman-Bucio, Dulce Maria, Carmona-Carmona, Jorge Abraham, Herrera-Gomez, Alberto |
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| Zdroj: | In Applied Surface Science 30 December 2024 678 |
| Databáze: | ScienceDirect |
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