Environmental stability and ageing of ScN thin films from XPS Ar+ depth profiling

Autor: Cichoň, Stanislav, More-Chevalier, Joris, Wdowik, Urszula D., de Prado, Esther, Bulíř, Jiří, Novotný, Michal, Fekete, Ladislav, Duchoň, Jan, Legut, Dominik, Lančok, Ján
Zdroj: In Applied Surface Science 15 November 2024 674
Databáze: ScienceDirect