Reactive ion etching of indium gallium zinc oxide (IGZO) and chamber cleaning using low global warming potential gas

Autor: Woo Hong, Jong, Woo Tak, Hyun, Il Cho, Nam, Joon Eoh, Hyeong, Ho Kim, Chan, Won Jeong, Jun, Lim Kim, Kyung, Jin Yoo, Hee, Min Cho, Hyun, Gwang Jeong, Yu, Woon Jung, Da, Jong Yeo, Yun, Young Yeom, Geun, Woo Kim, Dong
Zdroj: In Applied Surface Science 30 October 2024 671
Databáze: ScienceDirect
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