Si precursor inhibitors for area selective deposition of Ru
| Autor: | Gu, Bonwook, Yasmeen, Sumaira, Oh, Geun-Ha, Oh, Il-Kwon, Kang, Youngho, Lee, Han-Bo-Ram |
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| Zdroj: | In Applied Surface Science 1 October 2024 669 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Gu, Bonwook, Yasmeen, Sumaira, Oh, Geun-Ha, Oh, Il-Kwon, Kang, Youngho, Lee, Han-Bo-Ram |
|---|---|
| Zdroj: | In Applied Surface Science 1 October 2024 669 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect