Early-stage silver growth during sputter deposition on SiO2 and polystyrene – Comparison of biased DC magnetron sputtering, high-power impulse magnetron sputtering (HiPIMS) and bipolar HiPIMS
| Autor: | Reck, Kristian A., Bulut, Yusuf, Xu, Zhuijun, Liang, Suzhe, Strunskus, Thomas, Sochor, Benedikt, Gerdes, Holger, Bandorf, Ralf, Müller-Buschbaum, Peter, Roth, Stephan V., Vahl, Alexander, Faupel, Franz |
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| Zdroj: | In Applied Surface Science 1 September 2024 666 |
| Databáze: | ScienceDirect |
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