Structural, electronic, and optical properties of 6H-SiC layers synthesized by implantation of carbon ions into silicon
| Autor: | Boukhvalov, D.W., Zatsepin, D.A., Biryukov, D.Yu., Shchapova, Yu.V., Gavrilov, N.V., Zatsepin, A.F. |
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| Zdroj: | In Applied Surface Science 1 September 2024 666 |
| Databáze: | ScienceDirect |
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