Particle size dependence of nanoclustered ceria abrasives on surface activity and chemical mechanical planarization performance
| Autor: | Kim, Na-Yeon, Hwang, Uiseok, Sung, Jaeuk, Park, In-Kyung, Kim, Taesung, Suhr, Jonghwan, Nam, Jae-Do |
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| Zdroj: | In Applied Surface Science 1 August 2024 663 |
| Databáze: | ScienceDirect |
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