NF3 and F2 gas fluorination of GaN surface and Pt/GaN interface analyzed by hard X-ray photoelectron spectroscopy
| Autor: | Matsuda, Asahiko, Teramoto, Takashi, Nagata, Takahiro, Gerlach, Dominic, Shen, Peng, Ueda, Shigenori, Kimura, Takako, Dussarrat, Christian, Chikyow, Toyohiro |
|---|---|
| Zdroj: | In Applied Surface Science 30 June 2024 659 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect