Towards modeling of ZrO2 atomic layer deposition at reactor scale based on experimental kinetic approximation
| Autor: | Phung, Nhat-Minh, Ha, Minh-Tan, Bae, Si-Young, Lee, Soonil, Park, Tae-Joo, Kwon, Se-Hun, Jeong, Seong-Min |
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| Zdroj: | In Applied Surface Science 15 February 2024 646 |
| Databáze: | ScienceDirect |
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