Activation of Al2O3 surface passivation of silicon: Separating bulk and surface effects
| Autor: | Grant, N.E., Pain, S.L., Khorani, E., Jefferies, R., Wratten, A., McNab, S., Walker, D., Han, Y., Beanland, R., Bonilla, R.S., Murphy, J.D. |
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| Zdroj: | In Applied Surface Science 1 February 2024 645 |
| Databáze: | ScienceDirect |
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