Angstrom surface on copper induced by novel green chemical mechanical polishing using ceria and silica composite abrasives
| Autor: | Liu, Dongdong, Zhang, Zhenyu, Zhou, Hongxiu, Deng, Xingqiao, Shi, Chunjing, Meng, Fanning, Yu, Zhibin, Feng, Junyuan |
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| Zdroj: | In Applied Surface Science 15 December 2023 640 |
| Databáze: | ScienceDirect |
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