Ion beam processing with an ultra-low energy Ar+ micro-polisher: From fundamental understanding to process optimisation
Autor: | Philipp, Patrick, Defoort, Grégoire, Bahm, Alan, Wirtz, Tom |
---|---|
Zdroj: | In Applied Surface Science 1 December 2023 639 |
Databáze: | ScienceDirect |
Externí odkaz: |