On the surface biasing effectiveness during reactive high-power impulse magnetron sputter deposition of zirconium dioxide
| Autor: | Rezek, Jiří, Kozák, Tomáš, Farahani, Mina, Houška, Jiří |
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| Zdroj: | In Applied Surface Science 30 November 2023 638 |
| Databáze: | ScienceDirect |
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