High-κ Hf0.3Zr0.7O2 film with morphotropic phase boundary for DRAM capacitor by controlling H2O dose
| Autor: | Du, Xin-Zhe, Luo, Zhen, Shen, Sheng-Chun, Bai, Wei-Ping, Gan, Hui, Yin, Yue-Wei, Li, Xiao-Guang |
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| Zdroj: | In Applied Surface Science 30 November 2023 638 |
| Databáze: | ScienceDirect |
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