Brittle-to-ductile transition in nanoscratching of silicon and gallium arsenide using Berkovich and Conical tips

Autor: Li, Xuliang, Fan, Zhiqi, Huang, Shuiquan, Lu, Mingyuan, Huang, Han
Zdroj: In Applied Surface Science 15 November 2023 637
Databáze: ScienceDirect