Improving polishing efficiency of RB-SiC through femtosecond laser pretreatment

Autor: Chen, Huan, Wei, Chaoyang, Cao, Zhen, Peng, Xiaocong, Jiang, Zhigang, Wan, Songlin, Shao, Jianda
Zdroj: In Applied Surface Science 15 September 2023 631
Databáze: ScienceDirect
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