Ammonium chloride (–NH3+Cl-) salt formation from dichlorosilane decomposition and its potential impact on silicon nitride atomic layer deposition
| Autor: | Yang, Tsung-Hsuan, Cheng, Erik S., Johnson, Samuel M., Iwao, Toshihiko, Zhao, Jianping, Ekerdt, John G., L. G. Ventzek, Peter, Hwang, Gyeong S. |
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| Zdroj: | In Applied Surface Science 30 August 2023 629 |
| Databáze: | ScienceDirect |
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