Direct growth and interface reactions of ferroelectric Hf0.5Zr0.5O2 films on MoS2

Autor: Leem, Mirine, Eom, Deokjoon, Lee, Heesoo, Park, Kwangwuk, Jeong, Kwangsik, Kim, Hyoungsub
Zdroj: In Applied Surface Science 30 August 2023 629
Databáze: ScienceDirect