High-rate growth of gallium oxide films by plasma-enhanced thermal oxidation for solar-blind photodetectors
| Autor: | Su, Tong, Xiao, Bohan, Ai, Zikang, Bao, Lingjie, Chen, Wencheng, Shen, Yuheng, Cheng, Qijin, (Ken) Ostrikov, Kostya |
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| Zdroj: | In Applied Surface Science 1 July 2023 624 |
| Databáze: | ScienceDirect |
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