High-rate growth of gallium oxide films by plasma-enhanced thermal oxidation for solar-blind photodetectors
Autor: | Su, Tong, Xiao, Bohan, Ai, Zikang, Bao, Lingjie, Chen, Wencheng, Shen, Yuheng, Cheng, Qijin, (Ken) Ostrikov, Kostya |
---|---|
Zdroj: | In Applied Surface Science 1 July 2023 624 |
Databáze: | ScienceDirect |
Externí odkaz: |