Plasma enhanced atomic layer deposition of crystallized gallium phosphide on Si with tri-Ethylgallium and tri-tert-Butylphosphine
| Autor: | Yun, SeongUk, Kuo, Cheng-Hsuan, Lee, Ping-Che, Ueda, Scott T., Wang, Victor, Kashyap, Harshil, Mcleod, Aaron J., Zhang, Zichen, Winter, Charles H., Kummel, Andrew C. |
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| Zdroj: | In Applied Surface Science 15 May 2023 619 |
| Databáze: | ScienceDirect |
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