Embossing of silicon with an ultrashort laser pulse diffracted by a bubble in liquid
| Autor: | Romashevskiy, S.A., Ignatov, A.I., Zhakhovsky, V.V., Eganova, E.M., Pershina, E.A., Inogamov, N.A., Ashitkov, S.I. |
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| Zdroj: | In Applied Surface Science 1 April 2023 615 |
| Databáze: | ScienceDirect |
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