Interfacial reactions and nucleation of WAl12 phase on electromigration in hydrogen exposed semiconductor interconnects
| Autor: | Seok Kim, Jin, Hyun Choe, Jin, Won Ahn, Da, Soo Jung, Eun, Gyu Pyo, Sung |
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| Zdroj: | In Applied Surface Science 15 March 2023 613 |
| Databáze: | ScienceDirect |
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