Ultrathin epitaxial NbNx film deposited by PEALD method on C-plane sapphire: Growth, structure and superconducting properties
| Autor: | Shibalov, M.V., Sirotina, A.P., Pershina, E.A., Martovitskii, V.P., Shibalova, A.A., Mumlyakov, A.M., Trofimov, I.V., Timofeeva, E.R., Porokhov, N.V., Zenova, E.V., Tarkhov, M.A. |
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| Zdroj: | In Applied Surface Science 1 March 2023 612 |
| Databáze: | ScienceDirect |
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