Structural, optical, and electrical properties of TiO2 thin films deposited by ALD: Impact of the substrate, the deposited thickness and the deposition temperature
| Autor: | Jolivet, Aline, Labbé, Christophe, Frilay, Cédric, Debieu, Olivier, Marie, Philippe, Horcholle, Bryan, Lemarié, Franck, Portier, Xavier, Grygiel, Clara, Duprey, Sylvain, Jadwisienczak, Wojciech, Ingram, David, Upadhyay, Mudit, David, Adrian, Fouchet, Arnaud, Lüders, Ulrike, Cardin, Julien |
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| Zdroj: | In Applied Surface Science 15 January 2023 608 |
| Databáze: | ScienceDirect |
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