Ab-initio molecular dynamics simulations of the reactivity of MoS2 towards F2 molecules: Implications for etching processes
| Autor: | Farigliano, Lucas M., Paredes-Olivera, Patricia A., Patrito, Eduardo M. |
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| Zdroj: | In Applied Surface Science 1 January 2023 607 |
| Databáze: | ScienceDirect |
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