Nanogratings fabricated by wet etching assisted femtosecond laser modification of silicon for surface plasmon resonance sensing
| Autor: | Wu, Meng, Xu, Nianxi, Wang, Erxi, Gen, Shannan, Zhu, Huaxin, Liu, Cheng, Cao, Jianjun |
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| Zdroj: | In Applied Surface Science 30 November 2022 603 |
| Databáze: | ScienceDirect |
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