Insights into triazole derivatives as potential corrosion inhibitors in CMP process: Experimental evaluation and theoretical analysis

Autor: Li, Wei, Tan, Baimei, Zhang, Shihao, Guo, Lei, Ji, Jinbo, Yan, Mei, Wang, Ru
Zdroj: In Applied Surface Science 15 November 2022 602
Databáze: ScienceDirect