Low-temperature SiO2 film coatings onto Cu particles using the polygonal barrel-plasma chemical vapor deposition method
Autor: | Honda, Yuji, Mikami, Yukari, Inoue, Mitsuhiro, Shinagawa, Koji, Abe, Takayuki |
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Zdroj: | In Applied Surface Science 30 June 2022 588 |
Databáze: | ScienceDirect |
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