Low-temperature SiO2 film coatings onto Cu particles using the polygonal barrel-plasma chemical vapor deposition method

Autor: Honda, Yuji, Mikami, Yukari, Inoue, Mitsuhiro, Shinagawa, Koji, Abe, Takayuki
Zdroj: In Applied Surface Science 30 June 2022 588
Databáze: ScienceDirect