Role of the metal supply pathway on silicon patterning by oblique ion beam sputtering
| Autor: | Redondo-Cubero, A., Palomares, F.J., Lorenz, K., Rubio-Zuazo, J., Hübner, R., Mompeán, F.J., García-Hernández, M., Castro, G.R., Vázquez, L. |
|---|---|
| Zdroj: | In Applied Surface Science 1 April 2022 580 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect