Integration of epitaxial La2/3Sr1/3MnO3 thin films on silicon-on-sapphire substrate for MEMS applications
| Autor: | Chaluvadi, Sandeep Kumar, Wang, Zhe, Carvalho de Araújo, Laryssa M., Orgiani, Pasquale, Polewczyk, Vincent, Vinai, Giovanni, Rousseau, Olivier, Pierron, Victor, Pautrat, Alain, Domengès, Bernadette, Schlom, Darrell G., Méchin, Laurence |
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| Zdroj: | In Applied Surface Science 30 March 2022 579 |
| Databáze: | ScienceDirect |
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