Characteristics of a mixed-gas cluster ion beam for time-of-flight secondary ion mass spectrometry
| Autor: | Lee, Sang Ju, Hong, Aram, Cho, Jinwan, Choi, Chang Min, Baek, Ji Young, Eo, Jae Yeong, Cha, Byeong Jun, Byeon, Woo Jun, We, Jin Young, Hyun, Sangwon, Jeon, Minwoo, Jeon, Choelho, Ku, Dong Jin, Choi, Myoung Choul |
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| Zdroj: | In Applied Surface Science 15 January 2022 572 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect