Enhanced thermal stability of Mo film with low infrared emissivity by a TiN barrier layer

Autor: Sun, Binghui, Wang, Lei, Sun, Ying, Gao, Junhua, Cao, Hongtao, Ren, Jie, Cui, Jin, Yuan, Xiuliang, Li, Aoyu, Wang, Cong
Zdroj: In Applied Surface Science 1 January 2022 571
Databáze: ScienceDirect