Influence of Ar-impurities on the wettability of IBS-deposited Y2O3 thin films
| Autor: | Gischkat, Thomas a, Döbeli, Max b, Bächli, Andreas a, Botha, Roelene a, Balogh-Michels, Zoltán a, ⁎ |
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| Zdroj: | In Applied Surface Science 1 December 2021 568 |
| Databáze: | ScienceDirect |
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