Smoothing surface roughness using Al2O3 atomic layer deposition
| Autor: | Myers, Tyler J., Throckmorton, James A., Borrelli, Rebecca A., O'Sullivan, Malcolm, Hatwar, Tukaram, George, Steven M. |
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| Zdroj: | In Applied Surface Science 15 December 2021 569 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect