Organosiloxane nanolayer as diffusion barrier for Cu metallization on Si
| Autor: | Zhang, Yan-Ping, Chandra Sil, Manik, Chen, Chih-Ming |
|---|---|
| Zdroj: | In Applied Surface Science 30 November 2021 567 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Zhang, Yan-Ping, Chandra Sil, Manik, Chen, Chih-Ming |
|---|---|
| Zdroj: | In Applied Surface Science 30 November 2021 567 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect