Density functional theory study on the modification of silicon nitride surface by fluorine-containing molecules
| Autor: | Chowdhury, Tanzia, Hidayat, Romel, Kim, Hye-Lee, Mayangsari, Tirta Rona, Cho, Seongjae, Park, Sangjoon, Jung, Jongwan, Lee, Won-Jun |
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| Zdroj: | In Applied Surface Science 15 July 2021 554 |
| Databáze: | ScienceDirect |
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