Tuning oxygen vacancies and resistive switching properties in ultra-thin HfO2 RRAM via TiN bottom electrode and interface engineering

Autor: Yong, Zhihua, Persson, Karl-Magnus, Saketh Ram, Mamidala, D'Acunto, Giulio, Liu, Yi, Benter, Sandra, Pan, Jisheng, Li, Zheshen, Borg, Mattias, Mikkelsen, Anders, Wernersson, Lars-Erik, Timm, Rainer
Zdroj: In Applied Surface Science 15 June 2021 551
Databáze: ScienceDirect