Cu to Cu direct bonding at low temperature with high density defect in electrodeposited Cu

Autor: Han, Haneul, Lee, Chaerin, Kim, Youjung, Lee, Jinhyun, Kim, Rosa, Kim, Jongryoul, Yoo, Bongyoung
Zdroj: In Applied Surface Science 1 June 2021 550
Databáze: ScienceDirect