Effect of substrate tilt on sputter-deposited AuTa films
| Autor: | Engwall, A.M., Bayu Aji, L.B., Baker, A.A., Shin, S.J., Bae, J.H., McCall, S.K., Moody, J.D., Kucheyev, S.O. |
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| Zdroj: | In Applied Surface Science 1 May 2021 547 |
| Databáze: | ScienceDirect |
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