Effect of etching time in hydrofluoric acid on the structure and morphology of n-type porous silicon

Autor: Kopani, Martin, Mikula, Milan, Kosnac, Daniel, Kovac, Jaroslav, Trnka, Michal, Gregus, Jan, Jerigova, Monika, Jergel, Matej, Vavrinsky, Erik, Bacova, Silvia, Zitto, Peter, Polak, Stefan, Pincik, Emil
Zdroj: In Applied Surface Science 1 December 2020 532
Databáze: ScienceDirect