Etching processes of transferred and non-transferred multi-layer graphene in the presence of extreme UV, H2O and H2
| Autor: | Mund, B.K., Sturm, J.M., van den Beld, W.T.E., Lee, C.J., Bijkerk, F. |
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| Zdroj: | In Applied Surface Science 28 February 2020 504 |
| Databáze: | ScienceDirect |
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