Influence of nitrogen ion species on mass-selected low energy ion-assisted growth of epitaxial GaN thin films
| Autor: | Mensing, Michael, Schumacher, Philipp, Gerlach, Jürgen W., Herath, Sören, Lotnyk, Andriy, Rauschenbach, Bernd |
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| Zdroj: | In Applied Surface Science 31 December 2019 498 |
| Databáze: | ScienceDirect |
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